Fabrication of fine imaging devices using an external proton microbeam
酒井 卓郎; 安田 良; 飯倉 寛; 野島 健大; 江夏 昌志; 佐藤 隆博; 石井 保行; 大島 明博*
Sakai, Takuro; Yasuda, Ryo; Iikura, Hiroshi; Nojima, Takehiro; Koka, Masashi; Sato, Takahiro; Ishii, Yasuyuki; Oshima, Akihiro*
We have successfully fabricated novel microscopic imaging devices made from UV/EB curable resin using an external scanning proton microbeams. The devices are micro-structured fluorescent plates that consist of an array of micro-pillars that align periodically. The base material used in the pillars is UV/EB curable resin and each pillar contains phosphor grains. The pattern exposures were performed using a proton beam writing technique. The height of the pillars depends on the range of the proton beam. Optical microscopy and scanning electron microscopy have been used to characterize the samples. The results show that the fabricated fluorescent plates are expected to be high-spatial-resolution imaging devices.
使用言語 : English
掲載資料名 : Nuclear Instruments and Methods in Physics Research B
: 332
ページ数 : p.238 - 241
発行年月 : 2014/08
出版社名 : Elsevier
発表会議名 : 21st International Conference on Ion Beam Analysis (IBA 2013)
開催年月 : 2013/06
開催都市 : Seattle
開催国 : U. S. A.
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登録番号 : BB20130926
抄録集掲載番号 : 42000909
論文投稿番号 : 14567
Accesses  (From Jun. 2, 2014)
- Accesses
分野:Instruments & Instrumentation
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